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发明名称
Fabricating method of semiconductor device
摘要
申请公布号
KR100564795(B1)
申请公布日期
2006.03.27
申请号
KR20020086922
申请日期
2002.12.30
申请人
发明人
分类号
H01L21/336;H01L21/265;H01L21/31;H01L21/3205;H01L21/469;H01L21/4763
主分类号
H01L21/336
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代理人
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