SOLID ETALON FILTER

摘要

PROBLEM TO BE SOLVED: To provide a solid etalon filter which is stable against temperature variation while variation characteristics of a peak waveform do not draw a hysteresis curve when ambient temperature is varied by using an LiTaO3 substrate with superior temperature characteristics. SOLUTION: The solid etalon filter 9 is formed by providing a reflective film 11 formed of a dielectric etc., on a light incidence/projection surface on a substrate obtained by processing the LiTaO3 substrate to a designated plate thickness. The substrate 10 in use is obtained by decreasing the resistivity of the LiTaO3 substrate and a method of decreasing the resistivity is, for example, an oxygen reduction treatment, the resistivity is optimized preferably to about 2×1011Ωcm. COPYRIGHT: (C)2006,JPO&NCIPI