| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device capable of reducing length in a direction to connect a rotational center of a turn table and a rotational center of a polishing wheel. SOLUTION: This polishing device is furnished with the turn table 7 arranged free to rotate along a work put-on/off area and a polishing area, at least two chuck tables 8 furnished with work holding surfaces arranged on the turn table and sequentially moved to the polishing area and one polishing means having the polishing wheel 5 furnished with an annular grinding stone to polish a work 82 held on the work holding surface 81 of the chuck table 8 positioned in the polishing area, the annular grinding stone of the polishing wheel 5 is arranged so as to pass the rotational center P2 of the chuck table 8 positioned in the polishing area and it is constituted so that a line connecting the rotational center P2 of the chuck table 8 and the rotational center P3 of the polishing wheel 5 and a line connecting the rotational center P2 of the chuck table 8 and the rotational center P1 of the turn table make a specified angle. COPYRIGHT: (C)2006,JPO&NCIPI
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