| 发明名称 |
Thin layer element and associated fabrication process |
| 摘要 |
A method is provided for fabricating a thin layer element, in which a layer of a first material supports a pattern of a second material having a thickness of less than 15 nm, including a step of doping by implanting a chemical species over at least a portion of the layer-pattern assembly to stabilize the pattern on the layer.
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| 申请公布号 |
US2006060846(A1) |
申请公布日期 |
2006.03.23 |
| 申请号 |
US20050211255 |
申请日期 |
2005.08.19 |
| 申请人 |
BARBE JEAN-CHARLES;VINET MAUD;FAYNOT OLIVIER |
发明人 |
BARBE JEAN-CHARLES;VINET MAUD;FAYNOT OLIVIER |
| 分类号 |
H01L29/02;H01L21/265;H01L21/425;H01L21/762 |
主分类号 |
H01L29/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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