Optical system image characteristics adjusting method, involves illuminating optical unit with form-changing and/or refractive index changing processing radiation, based on form-changing and/or refractive index change correction

摘要

The method involves performing a wave front measurement for locally released determination of a wave front actual process in an optical system. A form-changing and/or refractive index change correction of an optical unit is computed, to adjust a wave front actual process to a wave front reference process. The unit is illuminated with a form-changing and/or refractive index changing processing radiation, based on the correction. Independent claims are also included for the following: (A) a device for adjusting the image characteristics of an optical system (B) use of a device for adjusting the image characteristics of an optical system.