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发明名称
Verfahren zur Ausrichtung eines Halbleiterwafers und Justiermarke
摘要
申请公布号
DE10342775(B4)
申请公布日期
2006.03.23
申请号
DE2003142775
申请日期
2003.09.16
申请人
INFINEON TECHNOLOGIES AG
发明人
DRUMMER, HEIKE;STAECKER, JENS;FROEHLICH, HANS-GEORG;GRUSS, STEFAN;WIENHOLD, RALPH;GRAF, WERNER
分类号
H01L23/544;G03F9/00;H01L21/66;H01L21/8242
主分类号
H01L23/544
代理机构
代理人
主权项
地址
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