| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical element which shows fine reflection characteristics for a long period, and to provide a projection aligner into which the optical element is incorporated as a projection optical system or the like. <P>SOLUTION: The optical element has a protective layer 30 as its uppermost layer, which contains at least any one of niobium, ruthenium, rhodium, platinum, gold, silver, palladium, osmium, and iridium, and at least any one of nickel, palladium, platinum, silver, rhodium, and ruthenium. This inhibits an oxidizing reaction or carbon film formation at the surface of the optical element 50 even if it is radiated with UV-rays in the projection aligner. The optical element 50, therefore, retains its fine reflection characteristics. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
