| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing apparatus which prevents a contaminant from remaining in a convexo-concave part and a specific place of a work. SOLUTION: In the processing part 2 of the dicing apparatus 1, an injection means 91 which changes the injection direction of a cleaning liquid to be injected to the workpiece W to an arbitrary direction during the processing of the workpiece is provided. It thereby supplies the cleaning liquid concentrically to the specific position of the workpiece W so that the contaminant remaining in the workpiece W may be effectively removed. COPYRIGHT: (C)2006,JPO&NCIPI |
