| 摘要 |
PROBLEM TO BE SOLVED: To provide a large-area hot plate, which can be effectively utilized for the heat treatment of an object to be heat treated such as a large-area LCD substrate, a substrate for a hard disc, or a glass substrate for a plasma display panel or the like, by reducing a weight and electric capacity per piece of heating plates through alteration of a structure of the hot plate, and to provide a heat treatment device using the same. SOLUTION: The hot plate for heating a flat-shaped heated object is structured by a heating element, a heat transfer plate and a plate-shape support to make up a large-area hot plate, so that its deformation can be prevented without increasing the thickness of the heat transfer plate, and therefore, a weight per piece of heating plate can be reduced, and at the same time, an electric capacity can be lowered. The heat treatment device, for heating a plate-shaped product, is provided with a plurality of heating plates fitted in multiple steps with gaps for placing the plate-shaped product between the heating plates. COPYRIGHT: (C)2006,JPO&NCIPI
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