| 摘要 |
PROBLEM TO BE SOLVED: To process a cross section of a sample with the temperature of the sample regulated when a cross-sectional structure of the sample is observed and analyzed. SOLUTION: This device for evaluating the cross section of a sample in a sample chamber is provided with: a sample stage for mounting the sample; a temperature regulation means for regulating the temperature of the sample; an ion beam generation means for radiating an ion beam to the sample in order to process and observe the cross section of the sample; and a detection means for detecting an emission signal emitted from the sample in response to the radiation for sample observation of the ion beam. The radiation of the ion beam by the ion beam generation means and the detection of the emission signal by the detection means are carried out in a state where the temperature of the sample is regulated at a predetermined value by the temperature regulation means. COPYRIGHT: (C)2006,JPO&NCIPI
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