| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a vacuum thin film effective even to the edge parts of a base material without shielding the edge parts of the base material. SOLUTION: In the method for depositing a vacuum thin film on a base material, the base material is closed or in contact with a support having a width larger than that of the base material, and the support is swelled to the further outside of both the edge parts of the base material, and, in a state where covering sheets are arranged at the swelled parts of the support, film deposition is performed. According to this invention, a vacuum thin film in which the whole face is uniform to the edge parts of the base material can be obtained. COPYRIGHT: (C)2006,JPO&NCIPI
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