DIAMOND FILM, ITS PRODUCING METHOD, ELECTROCHEMICAL ELEMENT, AND ITS PRODUCING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a diamond film having high surface smoothness and electrical conductivity; and a method for producing the same. SOLUTION: The diamond film is synthesized on a base body and contains nitrogen in an amount of≥3×1018cm-3. The diamond film can be produced on a substrate by a CVD method using a raw material gas containing a hydrocarbon, hydrogen and≥0.5% nitrogen source gas. COPYRIGHT: (C)2006,JPO&NCIPI