MEASURING METHOD AND MEASURING EQUIPMENT EMPLOYING HIGH FREQUENCY ELECTROMAGNETIC WAVE

摘要

[PROBLEMS] To provide a measuring method for detecting the phase error of reflected waves using the time waveform of detected reflected waves. [MEANS FOR SOLVING PROBLEMS] The measuring method comprises (1) a step for irradiating a sample (14) with a high frequency electromagnetic wave (e.g. terahertz wave) (13) and measuring the time waveform of a reflected wave, and (2) a step for attaining the phase error information in the time waveform of the reflected wave by analyzing the features of the time waveform. Based on the phase error information, shape information on the surface of the sample (14) or induction response in the sample (14) can be obtained. According to the invention, unevenness or surface shape of a variety of substances, e.g. semiconductor, metal and magnetic body, can be determined precisely and quickly without touching the substance.