| 摘要 |
PROBLEM TO BE SOLVED: To provide a variable optical attenuator derived from a sol-gel material and a method of manufacturing thereof. SOLUTION: A waveguide structure having a core region and an attenuation region is formed on the bottom cladding by photolithography. A top cladding is then formed on the bottom cladding and the waveguide structure and an electrode is next disposed thereon and is aligned above the attenuation region of the waveguide structure. Further, the waveguide structure is composed of a sol-gel material which is obtained by mixing a solution of metal alkoxide with a solution of organically modified Si-alkoxide. COPYRIGHT: (C)2006,JPO&NCIPI |
