| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical wafer boat which can reduce a slip of a wafer. SOLUTION: Supporting members 4, 5 locating at wafer inserting termination side are constituted in axial symmetry with respect to a virtual line which passes the inserting central point O of a wafer W, and extends in the inserting direction of the wafer W. And, the supporting members 4, 5 at wafer inserting rear edge side are formed toward the inserting central point O of the wafer W from the intersection of a round C in the extremity of a wafer supporters 2a, 3a and a virtual circle F having a diameter B, to the intersection of a virtual perpendicular D drawn to a virtual line Y and a virtual circle E having a diameter A. Furthermore, the wafer supporters 4a, 5a extend straight from the supporting members 4, 5. Since it is constituted in a locating relation like this, tip locations of the wafer supporters 4a, 5a shift back in the inserting direction of the wafer W. COPYRIGHT: (C)2006,JPO&NCIPI |
