| 摘要 |
PROBLEM TO BE SOLVED: To provide a reliable quality evaluation method and testing apparatus of a substrate which has an improved accuracy of detection of the deviation of the center of a through-hole from the center of a pad by finding the coordinates of the center of the pad accurately in a short time. SOLUTION: Light is irradiated on the front or rear surface of a substrate 1 to image the through-hole 4 formed in the substrate 1. Based on the obtained imaging data, the coordinates of the center P of the through-hole 4 is found. Then, light is radiated on the front and rear surfaces of the substrate 1 to image the pad 3 formed on the front surface of the substrate 1. Based on the obtained imaging data, the coordinates of the center O of the pad 3 is found. The deviationδof the center P of the through-hole from the center O of the pad is calculated for each pad 3. If the calculated deviationδis within an allowable value for every pad 3, it is acceptable. If any one of the calculated deviationδis out of the allowable value, it is not acceptable. COPYRIGHT: (C)2006,JPO&NCIPI |
