发明名称 CLEANING FLUID HEATER AND METHOD OF HEATING CLEANING FLUID USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a cleaning fluid heater capable of heating a cleaning fluid to a predetermined temperature while effectively preventing dust or the like from entering the inside, and a method of heating the cleaning fluid using the heater. SOLUTION: The cleaning fluid heater includes a heating reservoir (1) having part of a cleaning fluid line (2) provided inside, a tap water supply means (3) for supplying tap water to the reservoir (1), a tap water circulation means (4) for circulating the tap water supplied to the reservoir (1), a tap water heating means (6) for heating the tap water circulating by the circulation means (4), and a temperature monitor means (7) for monitoring the temperature of the tap water heated by the heating means (6). The method of heating the cleaning fluid includes steps of supplying a predetermined quantity of the tap water into the heating reservoir (1), circulating the supplied water while heating by the heating means, moving the cleaning fluid in the cleaning fluid line (2), and thus heating the cleaning fluid moving in the cleaning fluid line by means of the heated tap water. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006080431(A) 申请公布日期 2006.03.23
申请号 JP20040265294 申请日期 2004.09.13
申请人 RASUKO:KK 发明人 HASHIGUCHI TAKUO;WATABE MITSUAKI
分类号 H01L21/304;B08B3/04 主分类号 H01L21/304
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