| 摘要 |
PROBLEM TO BE SOLVED: To reduce the frequency of replacing an insulating spacer disposed between the grids of an ion beam irradiating device. SOLUTION: This insulating spacer disposed to keep insulation between the grids has a portion comprising an annular and almost flat surface part facing the grids and a cylindrical portion rising from the center part of the annular and almost flat surface part and abutting on the grids, and an annular groove which is perpendicular to the flat surface and which separates the circumferencial part of the annular part from the cylindrical part is disposed. COPYRIGHT: (C)2006,JPO&NCIPI
|
