发明名称 Substrate processing using molecular self-assembly
摘要 A system for molecular self-assembly referred to herein as a "molecular self-assembly system (MSAS)" includes at least one interface configured to receive at least one substrate. The MSAS also includes at least one molecular self-assembly module coupled to the interface. The MSAS can also include one or more of pre-processing modules, other molecular self-assembly processing modules, and post-processing modules, and may include any number, combination, and/or type of other modules. Each module of the MSAS can contain at least one of a number of different processes as appropriate to a processing configuration of the MSAS. The MSAS also includes at least one handler coupled to the interface and configured to move the substrate between the interface and one or more of the modules.
申请公布号 US2006060301(A1) 申请公布日期 2006.03.23
申请号 US20050231047 申请日期 2005.09.19
申请人 LAZOVSKY DAVID E;CHIANG TONY P;MALHOTRA SANDRA G 发明人 LAZOVSKY DAVID E.;CHIANG TONY P.;MALHOTRA SANDRA G.
分类号 H01L21/306;C23F1/00 主分类号 H01L21/306
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