| 摘要 |
PROBLEM TO BE SOLVED: To efficiently separate contaminants removed from an object to be cleaned to be dispersed into a liquid carbon dioxide, or contaminants dissolved in a liquid carbon dioxide with a necessary and minimum energy, and to clean the object to be cleaned while maintaining the liquid carbon dioxide clean. SOLUTION: The object to be cleaned 13 is stored in a cleaning vessel 14, and the liquid carbon dioxide 11 forming a first liquid phase is stored in the cleaning vessel 14. An ultrasonic oscillator 16 is provided inside the cleaning vessel 14. Impulse waves caused by the generation and extinction of cavitation by ultrasonic waves propagate through the liquid carbon dioxide 11 from the ultrasonic oscillator 16, and collide with the object to be cleaned 13, thereby removing the contaminants from the object to be cleaned 13. A liquid 12 forming a second liquid phase not to be dissolved in the liquid carbon dioxide 11 and comprising a polar aqueous solution or polar organic solvent is stored in the cleaning vessel 14, and the liquid carbon dioxide 11 of the first liquid phase is mixed with the liquid 12 of the second liquid phase by a mixing means 17. COPYRIGHT: (C)2006,JPO&NCIPI
|
