发明名称 |
Charged particle spectrometer and detector therefor |
摘要 |
A charged particle (e.g. photoelectron) spectrometer is operable in a first mode to produce an energy spectrum relating to the composition of a sample being analysed, and in a second mode to produce a charged particle image of the surface of the sample being analysed. A detector is used to detect charged particles produced in both modes of operation. A method of operation of the spectrometer includes the step of selecting which of said first and second modes to use and the detector being operated accordingly.
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申请公布号 |
US2006060770(A1) |
申请公布日期 |
2006.03.23 |
申请号 |
US20050533570 |
申请日期 |
2005.06.27 |
申请人 |
KRATOS ANALYTICAL LIMITED |
发明人 |
PAGE SIMON C.;PARK COLIN D.;HOPPER CHRISTOPHER M. |
分类号 |
B01D59/44;G01N23/00;H01J49/48 |
主分类号 |
B01D59/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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