| 发明名称 |
Inspection method and inspection equipment |
| 摘要 |
In an inspection method according to the invention, a plurality of drivers 21 incorporated in a tester 20 apply a fritting voltage to respective electrodes P via first probe pins 11 A included in pairs of first and second probe pins 11 A and 11 B and connected to the respective drivers.
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| 申请公布号 |
US2006061374(A1) |
申请公布日期 |
2006.03.23 |
| 申请号 |
US20050538785 |
申请日期 |
2005.06.10 |
| 申请人 |
SHINOZAKI DAI;KOMATSU SHIGEKAZU |
发明人 |
SHINOZAKI DAI;KOMATSU SHIGEKAZU |
| 分类号 |
G01R1/06;G01R31/02;G01R31/28;G01R31/3161;G01R31/319;H01L21/66 |
主分类号 |
G01R1/06 |
| 代理机构 |
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代理人 |
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