| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method whose process is simple more than a lithography process as a method removing the back passivation film of a back junction type solar batter partially. <P>SOLUTION: The passivation film is removed partially by irradiating a YAG laser on a silicon nitride film or titanium oxide film which is formed on the solar battery as a passivation film. An electrode is formed which contacts with the p<SP>+</SP>diffusion layer or n<SP>+</SP>diffusion layer through the removed part. The YAG laser is defocused with the diameter of spot adjusted to 10 to 200 nm and scans. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
