| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a guide path that eliminates pulsation in a sensor output even in a high flow rate region, while guiding a gas of an object to be measured to a sensor in a condition that waste materials such as dust and dirt are properly removed. <P>SOLUTION: The guide path comprises narrow paths 31-35 for raising the flow speed of a gas and deposition chambers 21-25 forming hollow rectangular solids for depositing the waste materials in the gas. The outlets of the narrow paths 31-35 are opened by pulling either side of right and left sides of one side wall surface of the deposition chambers 21-25, and the gas outlets from the deposition chambers 21-25 are opened to side wall surfaces of far sides from the outlets of the narrow paths 31-35 from among side wall surfaces vertical to one side wall surface to which the outlets of the narrow paths 31-35 are opened, and therewith the opening position is set at a position sufficiently separated from a side wall surface facing one side wall surface forward than it. Thereby, the gas changes a flow direction thereof at an angle larger than 90 degrees from flowing in to flowing out and passes widely in the deposition chambers 21-25, and then a deposition place is spread and the deposition chambers 21-25 are efficiently utilized. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
