| 摘要 |
PROBLEM TO BE SOLVED: To provide an electret actuator which has a simple constitution and can improve the linearity, by reducing jolting of a moving member during travel, without increasing the number of constituent elements. SOLUTION: The electret actuator has a fixed substrate 29, having a plurality of driving electrodes 28 on a surface and a mover 25 which has an electret region 26 made into a beltlike electret at a prescribed pitch opposite the drive electrodes 28 on the fixed substrate 29 and receives a driving force with the charges of the driving electrodes 28 to move relatively to the fixed substrate 29. The electret region 26 is formed wider nearly in the center than at both ends. Then a drive circuit applies a voltage to the driving electrodes 28 and then the mover 25 moves in a prescribed direction. COPYRIGHT: (C)2006,JPO&NCIPI
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