发明名称 OPTICAL AXIS ADJUSTMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an optical axis adjustment device that reduces a change in an amount of shift in tilt alignment and is compact. SOLUTION: The optical axis adjustment device 200 includes: an optical element 133a; a fixing part 210 disposed on the outside diameter side of the optical element 133a; and a plurality of support parts 230 and 240 extending from the fixing part 210 and the peripheral part 220 of the optical element 133a and supporting the optical element 133a so that the optical axis of the optical element 133a is adjustable. The support parts 230 and 240 support the optical element 133a on the fixing part 210 so as to be rotatable around an axis passing through the support parts 230 and 240 and almost perpendicular to the optical axis. In addition, by displacing the peripheral edge part 220 of the optical element 133a in the direction of the optical axis, the support parts support the optical element 133a so that the optical axis of the optical element 133a is tiltable on a plane including the optical axis and the support parts 230 and 240. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006078873(A) 申请公布日期 2006.03.23
申请号 JP20040264129 申请日期 2004.09.10
申请人 NIKON CORP 发明人 KAMATA TETSUHARU
分类号 G02B7/02;G03B5/06 主分类号 G02B7/02
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