发明名称 |
Hermetically sealed microdevice with getter sheild |
摘要 |
A microdevice that comprises a device microstructure ( 38 ) and vent channel ( 34 ) in a wafer ( 14 ) that is sandwiched between a substrate ( 10 ) and a cap ( 16 ). The cap ( 16 ) and substrate ( 10 ) have recesses ( 41, 21 ) around the microstructure ( 22 ) to define a cavity. A vent ( 25 ) is connected to the vent channel ( 34 ) and subsequently to the cavity. The vent ( 25 ) is used to evacuate and seal the microstructure ( 38 ) in the cavity. A getter layer ( 32 ) can be used to maintain the cavity vacuum. An electrical connection can be provided through the vent ( 25 ), vent channel ( 34 ) and cavity to the getter ( 32 ) to electrically ground the getter layer ( 32 ).
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申请公布号 |
US2006063462(A1) |
申请公布日期 |
2006.03.23 |
申请号 |
US20040947962 |
申请日期 |
2004.09.23 |
申请人 |
DING XIAOYI;FRYE JEFFREY J;SCHUSTER JOHN P |
发明人 |
DING XIAOYI;FRYE JEFFREY J.;SCHUSTER JOHN P. |
分类号 |
H01J9/24;B81C99/00;H01J9/00;H01J9/26 |
主分类号 |
H01J9/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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