| 摘要 |
PROBLEM TO BE SOLVED: To provide a means for reducing a washing liquid to be used and performing good washing free from washing irregularity without causing a solvent shock, in a coating apparatus having a washing mechanism for washing the interior of the piping of a coating unit part or the interior of a die head or the like using at least two kinds of solvents while successively changing a solvent having the compatibility with a coating solution to a solvent having high washing properties to dry the same. SOLUTION: In the coating apparatus having the washing mechanism, immediately before the washing liquid is introduced, it is introduced as a mist gas to keep the compatibility with the coating solution and the coating solution is discharged to the outside from a liquid feed piping system while preventing the drying of a coating solution contact part before the washing liquid is introduced. COPYRIGHT: (C)2006,JPO&NCIPI |
