| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern forming board and a pattern forming method which offer a precision inspect pattern useful to an inspection device with a broader scope of inspection, such as a defect inspection device using an ultraviolet light source or an ultraviolet laser light source. SOLUTION: In an area of a rectangular shape having short sides of 50μm or longer on a given board, a plurality of identical line patterns or identical hole patterns are formed regularly at constant intervals. COPYRIGHT: (C)2006,JPO&NCIPI
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