| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate which, even for a silicon substrate of a fragile material, is hardly chipped on the substrate edge faces or cracked on the substrate, and which prevents dust-generation from the substrate edge faces, and which prevents dust-generation by rubbing against a process cassette. SOLUTION: The silicon substrate for a magnetic recording medium is provided with a chamfer section between a main surface of the substrate and an edge face, wherein the edge face and the chamfer section of the substrate are of mirror plane, and a curved surface with a radius of greater than or equal to 0.01mm and less than 0.3mm is interposed between the main surface of the substrate and the chamfer section. In forming the curved surface, a silicon substrate laminate with a plurality of silicon substrates and spacers laminated is prepared and the inner periphery of a central hole of the substrates and an outer periphery of the substrates are brush polished. COPYRIGHT: (C)2006,JPO&NCIPI
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