MASK, FILM DEPOSITION METHOD AND METHOD FOR PRODUCING ORGANIC EL SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a mask capable of obtaining an objective film pattern with high precision even if the mask members to be used are large. SOLUTION: The mask comprises: a base member 2 having opening parts 7; and mask members 3 on the base member 2 each arranged at the position covering the opening part 7 and provided with a mask opening part 4 with a prescribed pattern. The mask opening part 4 has an opening area smaller than the area of a film to be formed. COPYRIGHT: (C)2006,JPO&NCIPI