| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanner in which the flutters of a micromirror is prevented by improving the structural stability of the micromirror, the scanning angle is increased and the scanning speed is increased. SOLUTION: An upper substrate 100 and a lower substrate 200 are vertically connected. A first center space part 101 and a second center space part are formed through the center part of the substrates, a micromirror part 110 is provided freely tunably. A pair of turning energizing parts 140 (torsion beam) supporting the micromirror part 110 on the upper substrate 100 is formed on the both ends of the micromirror part 110. A driving part is composed of a movable comb-type electrode 120 provided on the upper substrate 100 and a fixed comb-type electrode 220 provided on the lower substrate 200 and mutually acts with the movable comb-type electrode 120 by electrostatic force. A manufacturing technique for a semiconductor is applied for the manufacturing the scanner. COPYRIGHT: (C)2006,JPO&NCIPI
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