| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid droplet jet head wherein a nozzle hole having a precise diameter is formed by adjusting the diameter of the nozzle hole after the nozzle is formed, and also to provide the liquid droplet jet head manufactured by the method. SOLUTION: There is disclosed the method of manufacturing the liquid droplet jet head that comprises the plurality of nozzle holes, and independent ejection chambers communicating with the respective nozzle holes and diaphragms forming a part of the respective ejection chambers, and ejects a liquid droplet in each ejection chamber from the respective nozzle hole by using the deformation of the respective diaphragm. The method has: processes of: (1) forming a thermal oxidation film on a nozzle plate having the plurality of nozzle holes for ejecting liquid droplets by thermal oxidation; and (2) peeling the thermal oxidation film by etching. The process (1) and the process (2) are repeated two or more times. COPYRIGHT: (C)2006,JPO&NCIPI
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