| 摘要 |
The present invention relates to an FBAR filter having an unbalanced-balanced input/output structure, which actually enables the mass production of the FBAR filter while enabling a filter circuit and a balun circuit to be implemented on a single chip. The FBAR filter includes a wafer, a filter circuit unit and a balun circuit unit. The filter circuit unit includes a plurality of FBAR resonators formed on a predetermined region on a top of the wafer. The balun circuit unit includes a plurality of metal layers electrically connected to each other to implement a balun circuit and a plurality of dielectric layers each placed between the plurality of metal layers. The balun circuit unit is electrically connected to the filter circuit unit on a predetermined region of the wafer.
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