发明名称 |
ELECTROLYTIC PROCESSING APPARATUS AND ELECTROLYTIC PROCESSING METHOD |
摘要 |
The present invention provides an electrolytic processing apparatus and an electrolytic processing method which can effectively prevent the formation of pits that would impair the quality of the processed product. The electrolytic processing apparatus including: a processing electrode (210) for processing a workpiece; a feeding electrode (212) for feeding electricity to the workpiece; a power source (232) for applying a voltage between the processing electrode (210) and the feeding electrode (212); a pressure tight container (200) housing the processing electrode (210) and the feeding electrode (212) therein; and a high-pressure liquid supply system (204) for supplying a high-pressure liquid into the pressure tight container (210).
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申请公布号 |
KR20060026446(A) |
申请公布日期 |
2006.03.23 |
申请号 |
KR20057024910 |
申请日期 |
2005.12.26 |
申请人 |
EBARA CORPORATION |
发明人 |
NOJI IKUTARO;YASUDA HOZUMI;IIZUMI TAKESHI;HIROKAWA KAZUTO;KOBATA ITSUKI |
分类号 |
H01L21/3063;C25F3/00;C25F7/00;H01L21/304 |
主分类号 |
H01L21/3063 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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