发明名称 System and method for controlling nanostructure growth
摘要 Systems and methods are provided for controllably growing nanostructures, such as nanotubes, on a substrate, thus enabling the length and/or orientation of the nanostructures to be selectively controlled. A substrate's surface is selectively patterned to include topological structures, such as a blocking structure protruding from the surface and/or a recess in the surface, for influencing the nanostructure growth along the surface from a catalyst. The topological structures can be located to control the length and/or orientation of the nanostructures differently on different areas of the substrate. The topological structures may be of a substance that chemically inhibits growth of the nanostructure.
申请公布号 US2006060863(A1) 申请公布日期 2006.03.23
申请号 US20040946753 申请日期 2004.09.22
申请人 LU JENNIFER;MOLL NICOLAS J;KOPLEY THOMAS E 发明人 LU JENNIFER;MOLL NICOLAS J.;KOPLEY THOMAS E.
分类号 H01L29/15;H01L31/0312 主分类号 H01L29/15
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