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发明名称
Verfahren zur strukturierten, selektiven Matallisierung einer Oberfläche eines Substrats
摘要
申请公布号
DE10245928(B4)
申请公布日期
2006.03.23
申请号
DE2002145928
申请日期
2002.09.30
申请人
INFINEON TECHNOLOGIES AG
发明人
SCHMID, GUENTER
分类号
C23C18/18;B23K26/00;C23C18/16;H01L21/288;H01L21/60;H01L21/768;H05K3/18
主分类号
C23C18/18
代理机构
代理人
主权项
地址
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