| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration detection sensor applicable for a variety of equipment and fields requiring accurate detection and measurement of vibration. <P>SOLUTION: This vibration detection sensor 100 is provided with a substrate 2, and a cable-like piezoelectric element 1 connected directly to the substrate 2 in at least one end thereof. The cable-like piezoelectric element 1 is provided with a core electrode 3, a piezoelectric material 5 arranged in the periphery thereof, an outer electrode 7 arranged in the periphery thereof, and a coating layer 9 arranged in the periphery thereof, along a radial direction of the piezoelectric element 1. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
