| 摘要 |
PROBLEM TO BE SOLVED: To provide a board processing method and a board processing device wherein a water mark is not caused to occur by a small drying gas and the safety is high. SOLUTION: The board processing device 1 comprises a processing tub 10 which stores a treatment; and dips a processing board for a surface processing, a cleaner supplier 43 for supplying a cleaner to the processing tub, a discharge 44 for discharging the cleaner from the processing tub, and a drying gas supplier for supplying a drying gas to the processing tub. In the board processing method and the board processing device, the discharge 44 has a variable valve V<SB>3</SB>which can adjust a flow rate, and the drying gas supplier has a steam generator 35 for naturally evaporating a drying organic compound at a regular temperature. After termination of a cleaning process of the processing board, the supply of the drying gas containing steam from the steam generator 35 is started. Further, the variable valve is opened to discharge the cleaner at a low speed. At a timing when a lower end of the processing board is expelled from the cleaner, the variable valve is opened to discharge the cleaner quickly, and after termination of discharging the cleaner, the drying gas is continued to be supplied in a given time period for drying process. COPYRIGHT: (C)2006,JPO&NCIPI
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