发明名称 |
Integrated circuit comprising copper lines and process for forming copper lines |
摘要 |
An integrated circuit includes copper lines, wherein the crystal structure of the copper has a greater than 30% <001 > crystal orientation and a less than 20% <111> crystal orientation.
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申请公布号 |
US2006060976(A1) |
申请公布日期 |
2006.03.23 |
申请号 |
US20050220353 |
申请日期 |
2005.09.06 |
申请人 |
STMICROELECTRONICS SA |
发明人 |
CAUBET PIERRE;GREGOIRE MAGALI |
分类号 |
H01L23/48;H01L21/4763;H01L21/768 |
主分类号 |
H01L23/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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