发明名称 Integrated circuit comprising copper lines and process for forming copper lines
摘要 An integrated circuit includes copper lines, wherein the crystal structure of the copper has a greater than 30% <001 > crystal orientation and a less than 20% <111> crystal orientation.
申请公布号 US2006060976(A1) 申请公布日期 2006.03.23
申请号 US20050220353 申请日期 2005.09.06
申请人 STMICROELECTRONICS SA 发明人 CAUBET PIERRE;GREGOIRE MAGALI
分类号 H01L23/48;H01L21/4763;H01L21/768 主分类号 H01L23/48
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