| 摘要 |
A method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure comprises the steps of: (1) selecting at least one rotary component provided with a predetermined surface pattern for supporting a distribution of fluid dynamic-pressure; (2) forming an opaque and hard amorphous diamond (DLC, a-D) film (or nano-crystalline diamond film) on the pivotal surface of the component by physical vapor deposition (PVD). Thereby the pivotal surfaces of the rotary component and the pattern thereon can have excellent hardness, wearing resistance, rotational stailbity and durability under repeated urging of dynamic fluid pressure.
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