| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a structure of an actuator structured such that it can move an object at least at six degree of freedom. <P>SOLUTION: A substrate or a patterning device used for lithography equipment and a lithography device manufacturing method are presented. The substrate and the patterning device are aligned with a patterning boom, and are held by a support in a movable manner. However, due to the resonance of the support, a manufactured device may become unstable or the control system may become complicated, or both of them may be resulted in. Accordingly, an actuator assembly frame having a flexibly joining device connected to the support is provided with some actuators that are structured so as to move the support at several degree of freedom. In this way, the resonance is attenuated by a flexibly joined device, and as a result, the control system's band is expanded, thus improving the support's positioning accuracy. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
