发明名称 ACTUATOR
摘要 <P>PROBLEM TO BE SOLVED: To provide an actuator that enables obtaining a large driving force and that has a large deflection angle (amplitude). <P>SOLUTION: This actuator, serving as a vibration system of two degrees of freedom, comprises a first mass portion 2; second mass portions 1, 11; vibrating bodies 7 that each have piezoelectric elements 53, 55, and that is driven and vibrated by impressing an AC voltage to the piezoelectric elements 53, 55; supports 3 that support the first mass 2 and the second masses 1, 11; a pair of first elastic links 5, 5 that link the first mass 2 to the second masses 1, 11, in such a way that the first mass 2 can be rotated to the second masses 1, 11; and a pair of second links 4, 4 that link the second masses 1, 11 to the supports 3, in such a way that the second masses 1, 11 can be rotated to the supports 3. The second masses 1, 11 are each driven by the vibration of each vibrating body 7, and the first mass 2 turns accompanying it. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006081320(A) 申请公布日期 2006.03.23
申请号 JP20040263075 申请日期 2004.09.09
申请人 SEIKO EPSON CORP 发明人 SHIMIZU TAKESHI;YODA MITSUHIRO;MURATA AKIHIRO
分类号 H02N2/00;B41J2/44;B41J2/47;G02B26/10;H01L41/08;H01L41/09;H01L41/18;H01L41/187;H01L41/193;H01L41/22;H01L41/313 主分类号 H02N2/00
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