| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly flexible substrate inspection device capable of reducing a cost by remarkable size reduction of an image focusing lens and by simple constitution using a usual compact PSD, capable of realizing a precise measuring system able to cancel an error such as face failure by passing measuring light again through a scan mirror, and capable of changing freely an image formation magnification. SOLUTION: This inspection device is constituted of a light source 1 for emitting a parallel beam; a first beam splitter 12 for splitting the beam; the scan mirror 2 for changing an angle of the beam; a scan lens 3 for converging the scan beam; a second beam splitter 12 for splitting the scan beam into two; a mirror 15 for turning the split beam, the image-focusing lens 17 for converging the beam split by the first beam splitter 12; and the PSD 18 for detecting a converged light beam position. COPYRIGHT: (C)2006,JPO&NCIPI
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