| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film coverage evaluation method for measuring coverage in a minute area of a thin film even if the thin film and the material of a substrate with the thin film formed thereon contain the same material. SOLUTION: A silicon substrate 5 with a silane coupling film 2 formed thereon for analytical curve preparation is measured by an S-SIMS measurement method to obtain an ion strength ratio (PFPE ion strength value/silicon ion strength value) for the analytical curve between the strength value of organic PFPE ions contained in the coupling film 2 and the strength value of silicon ions. The analytical curve for finding the coverage is prepared, based on the strength ratio for the analytical curve. Then, the silicon substrate 5 with an actual silane coupling film 2 formed thereon is measured by the measurement method to obtain a specimen ion strength ratio between the strength value of PFPE ions contained in the coupling film 2 and the strength value of silicon ions. The prepared analytical curve is used for evaluating coverage from the specimen ion strength ratio. COPYRIGHT: (C)2006,JPO&NCIPI
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