| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a finely-processed metallic product, which efficiently processes a metal so as to acquire superior properties with high accuracy by using a binary fluid etching technique of simultaneously spraying both of an etching liquid and a gas from the same nozzle to spray the etching liquid in a mist form, and to provide the finely-processed metallic product made by the manufacturing method. SOLUTION: This manufacturing method is a method for processing a metallic sheet by using a binary fluid etching technique, comprising the steps of patterning a photoresist that has been coated on the surface of a metallic sheet, and simultaneously spraying both of the etching liquid and the gas from the same nozzle, wherein a temperature of the gas which is sprayed in a mixed state is controlled so as to be the temperature of the etching liquid or higher. COPYRIGHT: (C)2006,JPO&NCIPI
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