| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying device capable of maintaining the density of an inert gas while efficiently using the inert gas. SOLUTION: A connection duct 6 is installed between a carry-in chamber 10 and a carry-out chamber 30. Accordingly, air is moved from a carry-out chamber 30 side with a high pressure to a carry-in chamber 10 side with a low pressure through the connection duct 6 to uniformize a barometric pressure. Moreover, based on pressure data from differential pressure gauges 7 installed in the carry-in chamber 10 and the carry-out chamber 30, the opening rates of dampers 13 and 33 are controlled. Thus, a small barometric pressure difference between the carry-in chamber 10 and the carry-out chamber 30 which cannot be controlled merely by the connection duct 6 can be controlled. Furthermore, partition walls 16 and 36 are formed in the carry-in chamber 10 and the carry-out chamber 30 at positions nearer a radiation chamber 20 than exhaust ducts 15 and 35 to prevent the inert gas G in the radiation chamber 20 from being excessively flowing out. As a result, the density of the inert gas in the radiation chamber 20 can be maintained by supplying the minimum amount of the inert gas. COPYRIGHT: (C)2006,JPO&NCIPI |
