| 摘要 |
PROBLEM TO BE SOLVED: To remove properly by a cheap constitution foreign matters stuck to the movable portions of an accelerating sensor, in a manufacturing method of the accelerating sensor so constituted as to form its movable portions released from a substrate by etching the substrate. SOLUTION: In the manufacturing method of a capacitive accelerator 100 so constituted as to form as its movable portions movable electrodes 16 released from a substrate 10 by etching the SOI substrate 10, after forming the movable electrodes 16 and stationary electrodes 17 by etching the substrate 10, foreign matters K stuck to the substrate 10 are removed by such the heat treatment of the substrate 10 as the evaporation of the foreign matters K. Subsequently, electrodes 18 of wiring portions are formed in the substrate 10 by such dry processes as drafting and printing. COPYRIGHT: (C)2006,JPO&NCIPI
|
