| 摘要 |
PROBLEM TO BE SOLVED: To provide an effective method for determining the physical characteristics of an optical layer or a layer texture, by the measurement of transmission and/or reflection of a spectrum. SOLUTION: A reference value concerning a refractive index n<SB>0</SB>and/or an extinction coefficient k<SB>0</SB>that depends on the wavelength is selected from among the known values, or is obtained experimentally, in accordance with measurement of transmission and/or reflection of the spectrum. A variable part characterizing the layer is described by a wavelength dependent variable part constants K<SB>n</SB>and K<SB>k</SB>concerning the refractive index and the optical absorption coefficient. COPYRIGHT: (C)2006,JPO&NCIPI
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