| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for inspecting a minute structure, which precisely inspect the structure, having a minute movable section using a simple method. SOLUTION: A voltage is applied to a chip TP via a probe needle P from a voltage drive section 30, thereby moving the movable section of the minute structure. Then, a sound generated in response to the motion of the movable section of the minute structure is detected by a microphone 3. The sound detected by the microphone 3 is measured by a measuring section 25, and the characteristics of the chip TP to be detected is evaluated by a control section 20, based on the comparison with a sound which is detected with an ideal chip TP. COPYRIGHT: (C)2006,JPO&NCIPI
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